자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구 = A study on wafer transport system based on magnetic levitation

Advisors
김수현researcherKim, Soo-Hyunresearcher
Publisher
한국과학기술원
Issue Date
1996
Identifier
106250/325007 / 000943310
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ v, 41 p. ]

Keywords

전자석; 영구 자석; 자기 부상; 상반 구조; Antagonistic structure; Electromagnet; Permanent magnet; Magnetic levitation

URI
http://hdl.handle.net/10203/46574
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106250&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
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