자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구A study on wafer transport system based on magnetic levitation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김수현 | - |
| dc.contributor.advisor | Kim, Soo-Hyun | - |
| dc.contributor.author | 안길영 | - |
| dc.contributor.author | Ahn, Kil-Young | - |
| dc.date.accessioned | 2011-12-14T06:58:33Z | - |
| dc.date.available | 2011-12-14T06:58:33Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106250&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/46574 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ v, 41 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 전자석 | - |
| dc.subject | 영구 자석 | - |
| dc.subject | 자기 부상 | - |
| dc.subject | 상반 구조 | - |
| dc.subject | Antagonistic structure | - |
| dc.subject | Electromagnet | - |
| dc.subject | Permanent magnet | - |
| dc.subject | Magnetic levitation | - |
| dc.title | 자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구 | - |
| dc.title.alternative | A study on wafer transport system based on magnetic levitation | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106250/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000943310 | - |
| dc.contributor.localauthor | 김수현 | - |
| dc.contributor.localauthor | Kim, Soo-Hyun | - |
- Appears in Collection
- ME-Theses_Master(석사논문)
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