나노 정밀도를 갖는 다축 수직형 마스크 얼라이너의 설계 및 제어에 관한 연구 = Design and Control of a Nano-Precision Multi-Axis Vertical Mask Aligner

Advisors
권대갑researcherGweon, Dae-Gabresearcher
Publisher
한국과학기술원
Issue Date
2009
Identifier
308518/325007  / 020073147
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2009.2, [ vi, 66 p. ]

Keywords

piezoelectric actuator; mask aligner; vertical; flexure; precision stage; 압전구동기; 마스크 얼라이너; 수직형; 유연기구; 정밀스테이지; piezoelectric actuator; mask aligner; vertical; flexure; precision stage; 압전구동기; 마스크 얼라이너; 수직형; 유연기구; 정밀스테이지

URI
http://hdl.handle.net/10203/45684
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=308518&flag=t
Appears in Collection
ME-Theses_Master(석사논문)
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