오토마타 기반의 클러스터 장비의 제어로직 설계Automata-based supervisory control logic design for cluster tools
- Advisors
- 이태억researcher; Lee, Tae-Eogresearcher
- Description
- 한국과학기술원 : 산업공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180232/325007 / 020013432
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 산업공학과, 2003, [ iv, 56 p. ]
- Keywords
고장; 물류흐름; 제어로직; 클러스터장비; 회복; control; behavior; undesirable; configuration; automata
- Appears in Collection
- IE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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