오토마타 기반의 클러스터 장비의 제어로직 설계Automata-based supervisory control logic design for cluster tools
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이태억 | - |
| dc.contributor.advisor | Lee, Tae-Eog | - |
| dc.contributor.author | 이성진 | - |
| dc.contributor.author | Lee, Sung-Jin | - |
| dc.date.accessioned | 2011-12-14T04:22:30Z | - |
| dc.date.available | 2011-12-14T04:22:30Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180232&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/41688 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 산업공학과, 2003, [ iv, 56 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 고장 | - |
| dc.subject | 물류흐름 | - |
| dc.subject | 제어로직 | - |
| dc.subject | 클러스터장비 | - |
| dc.subject | 회복 | - |
| dc.subject | control | - |
| dc.subject | behavior | - |
| dc.subject | undesirable | - |
| dc.subject | configuration | - |
| dc.subject | automata | - |
| dc.title | 오토마타 기반의 클러스터 장비의 제어로직 설계 | - |
| dc.title.alternative | Automata-based supervisory control logic design for cluster tools | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180232/325007 | - |
| dc.description.department | 한국과학기술원 : 산업공학과, | - |
| dc.identifier.uid | 020013432 | - |
| dc.contributor.localauthor | 이태억 | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
- Appears in Collection
- IE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.