RPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구 = Study for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIC

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Advisors
권영세researcherKwon, Young-Seresearcher
Description
한국과학기술원 : 전기및전자공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
114242/325007 / 000953472
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 65 p. ]

Keywords

RPCVD; 광도파로; 화학기상증착; $Si_3N_4$; Optical waveguide; MIM capacitor; $SiO_2$

URI
http://hdl.handle.net/10203/36943
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114242&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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