RPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구Study for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIC

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dc.contributor.advisor권영세-
dc.contributor.advisorKwon, Young-Se-
dc.contributor.author이종주-
dc.contributor.authorLee, Jong-Joo-
dc.date.accessioned2011-12-14T01:40:20Z-
dc.date.available2011-12-14T01:40:20Z-
dc.date.issued1997-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114242&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/36943-
dc.description학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 65 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subjectRPCVD-
dc.subject광도파로-
dc.subject화학기상증착-
dc.subjectOptical waveguide-
dc.subjectMIM capacitor-
dc.titleRPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구-
dc.title.alternativeStudy for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIC-
dc.typeThesis(Master)-
dc.identifier.CNRN114242/325007-
dc.description.department한국과학기술원 : 전기및전자공학과, -
dc.identifier.uid000953472-
dc.contributor.localauthor권영세-
dc.contributor.localauthorKwon, Young-Se-
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EE-Theses_Master(석사논문)
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