DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 권영세 | - |
dc.contributor.advisor | Kwon, Young-Se | - |
dc.contributor.author | 이종주 | - |
dc.contributor.author | Lee, Jong-Joo | - |
dc.date.accessioned | 2011-12-14T01:40:20Z | - |
dc.date.available | 2011-12-14T01:40:20Z | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114242&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/36943 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 65 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | RPCVD | - |
dc.subject | 광도파로 | - |
dc.subject | 화학기상증착 | - |
dc.subject | Optical waveguide | - |
dc.subject | MIM capacitor | - |
dc.title | RPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구 | - |
dc.title.alternative | Study for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIC | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 114242/325007 | - |
dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
dc.identifier.uid | 000953472 | - |
dc.contributor.localauthor | 권영세 | - |
dc.contributor.localauthor | Kwon, Young-Se | - |
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