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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

The Effect of Structural Properties for Cleaning Performance of PVA brush during Post-CMP

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dc.contributor.authorShin, Sominko
dc.contributor.authorKim, Sanhako
dc.contributor.authorKim, Dong Geunko
dc.date.accessioned2023-01-31T11:01:26Z-
dc.date.available2023-01-31T11:01:26Z-
dc.date.created2023-01-10-
dc.date.issued2022-05-09-
dc.identifier.citationInternational Conference on Precision Engineering and Sustainable Manufacturing, PRESM 2022-
dc.identifier.urihttp://hdl.handle.net/10203/304893-
dc.languageEnglish-
dc.publisherThe Korean Society for Precision Engineering-
dc.titleThe Effect of Structural Properties for Cleaning Performance of PVA brush during Post-CMP-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameInternational Conference on Precision Engineering and Sustainable Manufacturing, PRESM 2022-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocationJeju Booyoung Hotel & Online-
dc.contributor.localauthorKim, Sanha-
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ME-Conference Papers(학술회의논문)
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