학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2008. 8., [ vii, 83 p. ]
polysilicon; core rod; diffusion barrier; refractory metal; sputtering system; 다결정실리콘; 확산방지막; 고융점 금속; 스퍼터; 고온확산; polysilicon; core rod; diffusion barrier; refractory metal; sputtering system; 다결정실리콘; 확산방지막; 고융점 금속; 스퍼터; 고온확산
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