High temperature characteristics of new metal core rod and diffusion barrier materials for polysilicon production = 다결정 실리콘 제조를 위한 새로운 코어로드 물질 및 확산방지막의 고온 특성 평가

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The refractory metal and their alloys were investigated to replace the Si core rod in bell-jar reactor for poly-Si production. And diffusion barrier materials for block the infiltration of impurities at high temperature were studied. The various thin films were deposited on Si wafer by co-sputtering system and heat-treatments were carried out in electrical tube furnace with a double column. To evaluate the characteristics of prepared films, SEM(Scanning Electron Microscope), XRD(X-Ray Diffractometer), AES(Auger Electron Spectroscope) and FE-TEM(Transmission Electron Microscope) were employed. W/Si, Ta-Mo/Si, W-Ta-Mo/Si and W-Mo/Si films were prepared by co-sputtering system. As a result of experiments, tantalum has a high oxidation property, so it was excluded from candidate of core rod materials. And W-Mo alloy contained molybdenum of 40% shows the good properties as a core rod material. The quaternary nitride films of W-Si-B-N barrier materials were studied for development of diffusion barrier. To observe the $N_2$ and B effect, W-Si-B-N films were prepared with varying the $N_2$ partial pressure and B/$WSi_2$ ratio. W-Si-B-N/Si film which is deposited under conditions of 0.5 $N_2$ partial pressure and 1 B/$WSi_2$ sputter power ratio was shown the best performance as a diffusion barrier.
Advisors
Park, Seung-binresearcher박승빈researcher
Description
한국과학기술원 : 생명화학공학과,
Publisher
한국과학기술원
Issue Date
2008
Identifier
301941/325007  / 020064134
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2008. 8., [ vii, 83 p. ]

Keywords

polysilicon; core rod; diffusion barrier; refractory metal; sputtering system; 다결정실리콘; 확산방지막; 고융점 금속; 스퍼터; 고온확산; polysilicon; core rod; diffusion barrier; refractory metal; sputtering system; 다결정실리콘; 확산방지막; 고융점 금속; 스퍼터; 고온확산

URI
http://hdl.handle.net/10203/29980
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=301941&flag=dissertation
Appears in Collection
CBE-Theses_Master(석사논문)
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