DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Park, Seung-bin | - |
dc.contributor.advisor | 박승빈 | - |
dc.contributor.author | Choi, Jun-myoung | - |
dc.contributor.author | 최준명 | - |
dc.date.accessioned | 2011-12-13T01:56:16Z | - |
dc.date.available | 2011-12-13T01:56:16Z | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=301941&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/29980 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 생명화학공학과, 2008. 8., [ vii, 83 p. ] | - |
dc.description.abstract | The refractory metal and their alloys were investigated to replace the Si core rod in bell-jar reactor for poly-Si production. And diffusion barrier materials for block the infiltration of impurities at high temperature were studied. The various thin films were deposited on Si wafer by co-sputtering system and heat-treatments were carried out in electrical tube furnace with a double column. To evaluate the characteristics of prepared films, SEM(Scanning Electron Microscope), XRD(X-Ray Diffractometer), AES(Auger Electron Spectroscope) and FE-TEM(Transmission Electron Microscope) were employed. W/Si, Ta-Mo/Si, W-Ta-Mo/Si and W-Mo/Si films were prepared by co-sputtering system. As a result of experiments, tantalum has a high oxidation property, so it was excluded from candidate of core rod materials. And W-Mo alloy contained molybdenum of 40% shows the good properties as a core rod material. The quaternary nitride films of W-Si-B-N barrier materials were studied for development of diffusion barrier. To observe the $N_2$ and B effect, W-Si-B-N films were prepared with varying the $N_2$ partial pressure and B/$WSi_2$ ratio. W-Si-B-N/Si film which is deposited under conditions of 0.5 $N_2$ partial pressure and 1 B/$WSi_2$ sputter power ratio was shown the best performance as a diffusion barrier. | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | polysilicon | - |
dc.subject | core rod | - |
dc.subject | diffusion barrier | - |
dc.subject | refractory metal | - |
dc.subject | sputtering system | - |
dc.subject | 다결정실리콘 | - |
dc.subject | 확산방지막 | - |
dc.subject | 고융점 금속 | - |
dc.subject | 스퍼터 | - |
dc.subject | 고온확산 | - |
dc.subject | polysilicon | - |
dc.subject | core rod | - |
dc.subject | diffusion barrier | - |
dc.subject | refractory metal | - |
dc.subject | sputtering system | - |
dc.subject | 다결정실리콘 | - |
dc.subject | 확산방지막 | - |
dc.subject | 고융점 금속 | - |
dc.subject | 스퍼터 | - |
dc.subject | 고온확산 | - |
dc.title | High temperature characteristics of new metal core rod and diffusion barrier materials for polysilicon production | - |
dc.title.alternative | 다결정 실리콘 제조를 위한 새로운 코어로드 물질 및 확산방지막의 고온 특성 평가 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 301941/325007 | - |
dc.description.department | 한국과학기술원 : 생명화학공학과, | - |
dc.identifier.uid | 020064134 | - |
dc.contributor.localauthor | Park, Seung-bin | - |
dc.contributor.localauthor | 박승빈 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.