Fabrication of multiple microcolumn array combined with field emission array

Abstract

We made a multiple electron microcolumn array. The electron source was made of either a Si based field emission array or a nickel coated array to keep the distances among sources equal. Laser micromachining was used to obtain a self-aligned microcolumn with five lenses: an extractor, an accelerator, and an Einzel lens. The aberration of each column was greatly improved compared to anodically bonded Si lens microcolumns. The field emission electron beam pattern was obtained from a multiple microcolumn. Its I-V dependence and possible application to the electron beam lithography with high throughput is discussed. (C) 1997 American Vacuum Society.