DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, YC | ko |
dc.contributor.author | Lee, Seung Seob | ko |
dc.contributor.author | Choi, SH | ko |
dc.contributor.author | Kim, SR | ko |
dc.contributor.author | Ko, SC | ko |
dc.date.accessioned | 2008-01-14T08:53:53Z | - |
dc.date.available | 2008-01-14T08:53:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-01 | - |
dc.identifier.citation | SENSORS AND ACTUATORS A-PHYSICAL, v.103, no.1-2, pp.130 - 134 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | http://hdl.handle.net/10203/2742 | - |
dc.description.abstract | This paper reports on a 3 mm x 3 mm x 0.003 mm piezoelectric membrane acoustic device, which works as a microphone and a microspeaker. It has a 0.5 mum thick zinc oxide (ZnO) piezoelectric thin film on a 1.5 mum thick low-stress silicon nitride membrane, made of LPCVD. The maximum deflection in the center of membrane, using laser Doppler vibrometer (LDV), is 1 mum at 7.3 kHz with input drive 15 V0-P (zero-peak). The output sound pressure level (SPL) of microspeaker is 76.3 dB SPL at 7.3 kHz, and 83.1 dB SPL at 13.3 kHz with input drive 15 V0-P. The distance between the reference microphone and piezoelectric microspeaker is 1 cm. The sensitivity of the microphone is 0.51 mV/Pa at 7.3 kHz with noise level of 18 dB SPL. (C) 2003 Elsevier Science B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Micromachined piezoelectric membrane acoustic device | - |
dc.type | Article | - |
dc.identifier.wosid | 000180418200018 | - |
dc.identifier.scopusid | 2-s2.0-0037438989 | - |
dc.type.rims | ART | - |
dc.citation.volume | 103 | - |
dc.citation.issue | 1-2 | - |
dc.citation.beginningpage | 130 | - |
dc.citation.endingpage | 134 | - |
dc.citation.publicationname | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.identifier.doi | 10.1016/S0924-4247(02)00310-2 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Lee, Seung Seob | - |
dc.contributor.nonIdAuthor | Kim, YC | - |
dc.contributor.nonIdAuthor | Choi, SH | - |
dc.contributor.nonIdAuthor | Kim, SR | - |
dc.contributor.nonIdAuthor | Ko, SC | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | ZnO piezoelectric thin film | - |
dc.subject.keywordAuthor | membrane | - |
dc.subject.keywordAuthor | microphone | - |
dc.subject.keywordAuthor | microspeaker | - |
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