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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Femtosecond pulses for 3-D surface measurement of microelectronic step-structures

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KIM, Young-Jinresearcher / Joo, Woo-Deok / Park, Jiyong / Kim, Seungman / Kim, Seung-Wooresearcher
We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses.
Publisher
The Optical Society (OSA)
Issue Date
2014-06
Language
English
Citation

2014 Conference on Lasers and Electro-Optics, CLEO 2014

URI
http://hdl.handle.net/10203/273187
Appears in Collection
ME-Conference Papers(학술회의논문)
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