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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

PROPERTIES OF ALUMINUM-OXIDE FILMS PREPARED BY PLASMA-ENHANCED METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

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KANG, CJ / Chun , Soung Soonresearcher / Lee, Won-Jongresearcher
Publisher
ELSEVIER SCIENCE SA LAUSANNE
Issue Date
1990-08
Language
English
Article Type
Article
Citation

THIN SOLID FILMS, v.189, no.1, pp.161 - 173

ISSN
0040-6090
URI
http://hdl.handle.net/10203/25298
Appears in Collection
RIMS Journal PapersMS-Journal Papers(저널논문)
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