Performance evaluation of precision nanopositioning devices caused by uncertainties due to tolerances using function approximation moment method

Precision nanopositioning is an important technology in industry and requires tight design specifications. Tolerances, although very small, are allocated in all dimensions of structures at devices and are understood as sources of performance variations. In this research, we aim to study detail influence of tolerances on various system response functions of a precision stage, especially parasitic motion and resonant frequencies. A function approximation moment method (FAMM) is developed and applied to study it. The variations are mathematically expressed as their statistical moments and the probabilities of satisfaction are obtained as a result of the FAMM. A finite element model of the target stage, which is nonmonolithic, is generated and verified with basic measurements. The possible initial deformation after assembly is found by the formulation of minimizing strain energy. With this model, the FAMM is used to estimate the statistical moments and probability density functions of the performance functions. The calculated results facilitate understanding of the characteristics of the stage in terms of probability. The inevitable mismatch, even under a small tolerance, is found to cause a large parasitic motion and should be considered in the design and manufacturing process. (c) 2006 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2006-01
Language
ENG
Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.77, pp.31 - 44

ISSN
0034-6748
DOI
10.1063/1.2162750
URI
http://hdl.handle.net/10203/2476
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
000234979400030.pdf(731.15 kB)Download
  • Hit : 498
  • Download : 589
  • Cited 0 times in thomson ci
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡClick to seewebofscience_button
⊙ Cited 4 items in WoSClick to see citing articles inrecords_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0