Basilar membrane-inspired self-powered acoustic sensor enabled by highly sensitive multi tunable frequency band

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Herein, we report a self-powered flexible piezoelectric acoustic sensor (f-PAS) inspired by basilar membrane in human cochlear. The f-PAS covered the voice frequency spectrum via the combination of its low quality (Q) factor and multi-resonant frequency tuning, exhibiting four to eight times higher sensitivity than the conventional condenser sensor. Our piezoelectric acoustic sensor with a thin membrane design produced sufficient output voltages by the distinct resonant movement of the Pb[Zr0.52Ti0.48]O-3 (PZT) membrane under the minute acoustic sound stimuli. Multiple sensor channels were integrated in a single f-PAS chip with a size of 1.5 x 3 cm(2), which acquire multi-tunable piezoelectric signals without any external power. A linear response of the resonance frequency of the curved piezoelectric membrane was theoretically investigated by a finite element method (FEM) calculation. Low Q factors from corresponding channels were achieved by optimal membrane thickness and channel length.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2018-11
Language
English
Article Type
Article
Keywords

HUMAN-MACHINE INTERFACE; CONDENSER MICROPHONE; FILM NANOGENERATOR; NETWORKS; DEVICES; NANOSENSORS; TECHNOLOGY; DIAPHRAGM; VOICE; MEMS

Citation

NANO ENERGY, v.53, pp.198 - 205

ISSN
2211-2855
DOI
10.1016/j.nanoen.2018.08.053
URI
http://hdl.handle.net/10203/246879
Appears in Collection
RIMS Journal PapersMS-Journal Papers(저널논문)
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