금속이온과 나노입자를 함유한 수용액을 이용한 이광자 흡수 광환원 공정 정밀화에 관한 연구

Abstract

In this study, direct fabrication of metallic micro-patterns with a high spatial resolution is tried employing the two-photon induced photoreduction process. A metallic pattern is fabricated by means of photoreduction of the metallic solution using a femtosecond laser. The metallic solution is composed of metallic salt, and a polymer which serves a uniform arrangement of silver ions. For an efficient fabrication, continuous forming window is obtained and direct seed generation method is proposed, generating metallic nano-particles in the metallic solution. Through this work, precise silver lines and two dimensional micro-patterns with a minimum width of 400nm are fabricated using the developed process.