Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height

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We propose and demonstrate a new method which employs time-of-flight detection of femtosecond laser pulses for precise height measurement of large steps. By using time-of-flight detection with fiber-loop optical-microwave phase detectors, precise measurement of large step height is realized. The proposed method shows uncertainties of 15 nm and 6.5 nm at sampling periods of 40 ms and 800 ms, respectively. This method employs only one free-running femtosecond mode-locked laser and requires no scanning of laser repetition rate, making it easier to operate. Precise measurements of 6 mu m and 0.5 mm step heights have been demonstrated, which show good functionality of this method for measurement of step heights. (c) 2018 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2018-04
Language
English
Article Type
Article
Keywords

DISTANCE MEASUREMENTS; FREQUENCY COMBS; LIGHT-PULSES; FIBER LASERS; LONG; INTERFERENCE; PROFILOMETRY; AIR

Citation

OPTICS LETTERS, v.43, no.7, pp.1447 - 1450

ISSN
0146-9592
DOI
10.1364/OL.43.001447
URI
http://hdl.handle.net/10203/241505
Appears in Collection
ME-Journal Papers(저널논문)
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