Structure modulated electrostatic deformable mirror for focus and geometry control

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We suggest a way to electrostatically control deformed geometry of an electrostatic deformable mirror (EDM) based on geometric modulation of a basement. The EDM is composed of a metal coated elastomeric membrane (active mirror) and a polymeric basement with electrode (ground). When an electrical voltage is applied across the components, the active mirror deforms toward the stationary basement responding to electrostatic attraction force in an air gap. Since the differentiated gap distance can induce change in electrostatic force distribution between the active mirror and the basement, the EDMs are capable of controlling deformed geometry of the active mirror with different basement structures (concave, flat, and protrusive). The modulation of the deformed geometry leads to significant change in the range of the focal length of the EDMs. Even under dynamic operations, the EDM shows fairly consistent and large deformation enough to change focal length in a wide frequency range (1 similar to 175 Hz). The geometric modulation of the active mirror with dynamic focus tunability can allow the EDM to be an active mirror lens for optical zoom devices as well as an optical component controlling field of view. (C) 2016 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2016-01
Language
English
Article Type
Article
Keywords

LIQUID LENS; AUTOFOCUS CAMERA; ADAPTIVE OPTICS; FOCAL LENGTH; MEMBRANE; MICROLENS; DESIGN; DRIVEN

Citation

OPTICS EXPRESS, v.24, no.1, pp.55 - 66

ISSN
1094-4087
DOI
10.1364/OE.24.000055
URI
http://hdl.handle.net/10203/239961
Appears in Collection
ME-Journal Papers(저널논문)
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