전해 도금 구리 박막의 두께가 탄성계수에 미치는 영향The Effect of Film Thickness on the Elastic Modulus of Electroplated Cu Thin Films
- Publisher
- 대한금속재료학회
- Issue Date
- 2006-10
- Language
- Korean
- Citation
Journal of the Korean Institute of Metals and Materials, v.44, no.10, pp.714 - 719
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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