전해 도금 구리 박막의 두께가 탄성계수에 미치는 영향The Effect of Film Thickness on the Elastic Modulus of Electroplated Cu Thin Films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김영무 | ko |
| dc.contributor.author | 한준희 | ko |
| dc.contributor.author | 홍순형 | ko |
| dc.date.accessioned | 2017-12-19T03:12:01Z | - |
| dc.date.available | 2017-12-19T03:12:01Z | - |
| dc.date.created | 2016-08-28 | - |
| dc.date.created | 2016-08-28 | - |
| dc.date.created | 2016-08-28 | - |
| dc.date.issued | 2006-10 | - |
| dc.identifier.citation | Journal of the Korean Institute of Metals and Materials, v.44, no.10, pp.714 - 719 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/228692 | - |
| dc.language | Korean | - |
| dc.publisher | 대한금속재료학회 | - |
| dc.title | 전해 도금 구리 박막의 두께가 탄성계수에 미치는 영향 | - |
| dc.title.alternative | The Effect of Film Thickness on the Elastic Modulus of Electroplated Cu Thin Films | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 44 | - |
| dc.citation.issue | 10 | - |
| dc.citation.beginningpage | 714 | - |
| dc.citation.endingpage | 719 | - |
| dc.citation.publicationname | Journal of the Korean Institute of Metals and Materials | - |
| dc.contributor.localauthor | 홍순형 | - |
| dc.contributor.nonIdAuthor | 김영무 | - |
| dc.contributor.nonIdAuthor | 한준희 | - |
| dc.description.isOpenAccess | N | - |
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