NUCLEATION AND GROWTH OF Al//2O//3 ON SILICON IN THE CVD PROCESS.

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Publisher
ECS
Issue Date
1984-05
Language
English
Citation

Extended Abstracts, Spring Meeting - Electrochemical Society 1984., pp.250

ISSN
0160-4619
URI
http://hdl.handle.net/10203/226892
Appears in Collection
RIMS Conference Papers
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