NUCLEATION AND GROWTH OF Al//2O//3 ON SILICON IN THE CVD PROCESS.
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi Sung Woo | ko |
| dc.contributor.author | Kim Chul | ko |
| dc.contributor.author | Kim Jae Gon | ko |
| dc.contributor.author | Chun , Soung Soon | ko |
| dc.date.accessioned | 2017-11-08T05:27:49Z | - |
| dc.date.available | 2017-11-08T05:27:49Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1984-05 | - |
| dc.identifier.citation | Extended Abstracts, Spring Meeting - Electrochemical Society 1984., pp.250 | - |
| dc.identifier.issn | 0160-4619 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/226892 | - |
| dc.language | English | - |
| dc.publisher | ECS | - |
| dc.title | NUCLEATION AND GROWTH OF Al//2O//3 ON SILICON IN THE CVD PROCESS. | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0021607671 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 250 | - |
| dc.citation.publicationname | Extended Abstracts, Spring Meeting - Electrochemical Society 1984. | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Cincinnati, OH | - |
| dc.contributor.localauthor | Chun , Soung Soon | - |
| dc.contributor.nonIdAuthor | Choi Sung Woo | - |
| dc.contributor.nonIdAuthor | Kim Chul | - |
| dc.contributor.nonIdAuthor | Kim Jae Gon | - |
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.