Highly aligned suspended nanowire array for self-heating type gas sensors

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A unique array structure of highly aligned and suspended palladium nanowires was demonstrated for application in self-heating type hydrogen gas sensors. Unlike conventional devices which employ randomly distributed bottom-up grown nanowires, in this study a top-down method which enables controllable and uniform device fabrication was used to produce the highly aligned nanowire array. Moreover, by suspending the array, heat loss through the substrate was eliminated, leading to a more efficient self-heating and rapid gas sensing response. As a result, with only a few milliwatts of power, the self-heated gas sensing device exhibited a considerably faster response time upon exposure to hydrogen gas than the device operating at room temperature.
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2017-01-23
Language
English
Citation

30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, pp.191 - 194

DOI
10.1109/MEMSYS.2017.7863373
URI
http://hdl.handle.net/10203/224010
Appears in Collection
ME-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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