Evolution of grain structure of as-deposited Cr thin films with deposition temperature
The growth of Cr thin films prepared by DC-magnetron sputter deposition was investigated by measuring the evolution of the grain size distribution and by computing the film growth using Monte Carlo simulation. The variation of grain size distribution with the deposition temperature is analyzed in terms of the film growth mechanisms. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
- Publisher
- PERGAMON-ELSEVIER SCIENCE LTD
- Issue Date
- 2003-04
- Language
- English
- Article Type
- Article
- Keywords
GROWTH
- Citation
SCRIPTA MATERIALIA, v.48, no.8, pp.1161 - 1166
- ISSN
- 1359-6462
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
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