Evolution of grain structure of as-deposited Cr thin films with deposition temperature

The growth of Cr thin films prepared by DC-magnetron sputter deposition was investigated by measuring the evolution of the grain size distribution and by computing the film growth using Monte Carlo simulation. The variation of grain size distribution with the deposition temperature is analyzed in terms of the film growth mechanisms. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
2003-04
Language
ENG
Keywords

GROWTH

Citation

SCRIPTA MATERIALIA, v.48, no.8, pp.1161 - 1166

ISSN
1359-6462
URI
http://hdl.handle.net/10203/2224
Appears in Collection
MS-Journal Papers(저널논문)MS-Journal Papers(저널논문)
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