DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Joong Keun | ko |
dc.contributor.author | Kim, JH | ko |
dc.contributor.author | Park, SI | ko |
dc.contributor.author | Lee, HyuckMo | ko |
dc.contributor.author | Oh, DY | ko |
dc.date.accessioned | 2007-11-29T06:59:21Z | - |
dc.date.available | 2007-11-29T06:59:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-04 | - |
dc.identifier.citation | SCRIPTA MATERIALIA, v.48, no.8, pp.1161 - 1166 | - |
dc.identifier.issn | 1359-6462 | - |
dc.identifier.uri | http://hdl.handle.net/10203/2224 | - |
dc.description.abstract | The growth of Cr thin films prepared by DC-magnetron sputter deposition was investigated by measuring the evolution of the grain size distribution and by computing the film growth using Monte Carlo simulation. The variation of grain size distribution with the deposition temperature is analyzed in terms of the film growth mechanisms. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved. | - |
dc.description.sponsorship | The authors are grateful to the Ministry of Science and Technology, Korea for the financial support of this research through the Nanostructure Technology Project. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | - |
dc.subject | GROWTH | - |
dc.title | Evolution of grain structure of as-deposited Cr thin films with deposition temperature | - |
dc.type | Article | - |
dc.identifier.wosid | 000181726000030 | - |
dc.identifier.scopusid | 2-s2.0-0037437265 | - |
dc.type.rims | ART | - |
dc.citation.volume | 48 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 1161 | - |
dc.citation.endingpage | 1166 | - |
dc.citation.publicationname | SCRIPTA MATERIALIA | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Park, Joong Keun | - |
dc.contributor.localauthor | Lee, HyuckMo | - |
dc.contributor.nonIdAuthor | Kim, JH | - |
dc.contributor.nonIdAuthor | Park, SI | - |
dc.contributor.nonIdAuthor | Oh, DY | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | thin film | - |
dc.subject.keywordAuthor | physical vapor deposition | - |
dc.subject.keywordAuthor | grain growth | - |
dc.subject.keywordAuthor | lognormal distribution | - |
dc.subject.keywordAuthor | Monte Carlo simulation | - |
dc.subject.keywordPlus | GROWTH | - |
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