High-Performance Flexible Thermoelectric Power Generator Using Laser Multiscanning Lift-Off Process

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Flexible thermoelectric generators (f-TEGs) are emerging as a semipermanent power source for self-powered sensors, which is an important area of research for next-generation smart network monitoring systems in the Internet-of-things era. We report in this paper a f-TEG produced by a screen printing technique (SPT) and a laser multiscanning (LMS) lift-off process. A screen-printed TEG was fabricated on a SiO2/a-Si/quartz substrate via the SPT process, and the LMS process completely separated the rigid quartz substrate from the original TEG by selective reaction of the XeCl excimer laser with the exfoliation layer (a-Si). Using these techniques, we fabricate a prototype f-TEG composed of an array of 72 TE couples that exhibits high flexibility at various bending radii, together with excellent output performance (4.78 mW/cm(2) and 20.8 mW/g at Delta T = 25 degrees C). There is no significant change in the device performance even under repeated bending of 8000 cycles.
Publisher
AMER CHEMICAL SOC
Issue Date
2016-12
Language
English
Article Type
Article
Keywords

THIN-FILMS; AMORPHOUS-SILICON; ANNEALING PROCESS; TEMPERATURE; DEVICES

Citation

ACS NANO, v.10, no.12, pp.10851 - 10857

ISSN
1936-0851
DOI
10.1021/acsnano.6b05004
URI
http://hdl.handle.net/10203/220750
Appears in Collection
MS-Journal Papers(저널논문)EE-Journal Papers(저널논문)
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