Browse "School of Electrical Engineering(전기및전자공학부)" by Subject EXCIMER-LASER
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| Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation Poon, CH; Cho, Byung Jin; Lu, YF; Bhat, M; See, A, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.21, no.2, pp.706 - 709, 2003-02 |
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