High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

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We propose dual-detection confocal reflectance microscopy (DDCRM) for high-speed 3D surface profiling. In comparison with conventional confocal microscopy, DDCRM can realize surface profiling without axial scanning. DDCRM is composed of two point detectors, each with a pinhole of different size. The ratio of the axial response curves measured by the two detectors provides the relationship between the axial position of the sample and the ratio of the intensity signals. Furthermore, DDCRM has a normalizing effect which allows this method to accurately measure the height of samples with various reflectance characteristics.
Publisher
IOP PUBLISHING LTD
Issue Date
2014-12
Language
English
Article Type
Article
Citation

MEASUREMENT SCIENCE & TECHNOLOGY, v.25, no.12

ISSN
0957-0233
DOI
10.1088/0957-0233/25/12/125403
URI
http://hdl.handle.net/10203/193895
Appears in Collection
ME-Journal Papers(저널논문)
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