Precise rotary motor by inchworm motion using dual wrap belts

A new type of rotary motor by inchworm motion using two belts is developed. A rotor is wrapped by two opposite belts which are connected to piezoelectric actuators. A serial lever structure with flexure hinges is used to connect a belt and piezoelectric actuators. The lever structure amplifies micro displacement of a piezoelectric actuator. A rotational motion with the step size of 2.36 mu rad is obtained through this work. An angular step size can be further reduced by increasing the rotor radius. We present a analysis model of the motor for a design of a similar precise motor. (C) 1999 American Institute of Physics. [S0034-6748(99)04004-6].
Publisher
AMER INST PHYSICS
Issue Date
1999-05
Language
ENG
Keywords

SCANNING TUNNELING MICROSCOPE; PIEZOELECTRIC STEPPER MOTOR; MICROPOSITIONER; MECHANISM; DESIGN; DEVICE; PROBE

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.70, no.5, pp.2546 - 2550

ISSN
0034-6748
URI
http://hdl.handle.net/10203/1880
Appears in Collection
ME-Journal Papers(저널논문)
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