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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Non-destructive surface profile measurement of a thin film deposited on a patterned sample

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dc.contributor.authorKim, DSko
dc.contributor.authorChegal, Wonko
dc.contributor.authorKim, Soohyunko
dc.contributor.authorKong, HJko
dc.contributor.authorLee, YWko
dc.date.accessioned2007-11-12T08:12:53Z-
dc.date.available2007-11-12T08:12:53Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2003-09-30-
dc.identifier.citation2003 International Conference on Characterization and Metrology for ULSI Technology, pp.357 - 361-
dc.identifier.urihttp://hdl.handle.net/10203/1877-
dc.description2003 International Conference on Characterization and Metrology for ULSI Technologyen
dc.description.sponsorshipRedistibution subject to AIP license or copyright, see http://proceedings.aip.org/proceedings/cpsr.jspen
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherAmerican Institute of Physics-
dc.titleNon-destructive surface profile measurement of a thin film deposited on a patterned sample-
dc.typeConference-
dc.identifier.wosid000186232400046-
dc.type.rimsCONF-
dc.citation.beginningpage357-
dc.citation.endingpage361-
dc.citation.publicationname2003 International Conference on Characterization and Metrology for ULSI Technology-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationUSA-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.nonIdAuthorKim, DS-
dc.contributor.nonIdAuthorChegal, Won-
dc.contributor.nonIdAuthorKong, HJ-
dc.contributor.nonIdAuthorLee, YW-
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ME-Conference Papers(학술회의논문)
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