감광유리를 이용한 MEMS 촉매 연소기의 제작 및 성능 평가

Abstract

MEMS catalytic combustors were fabricated to use in micro-power sources as a heat source. The combustor was fabricated by photolithography and anisotropic wet etching of photosensitive glass wafers. Two different catalyst loading methods were used to complete the fabrication of the combustors. For thin film type, the Al2O3 was washcoated on the surface of the combustion chamber as a catalyst support, and for packed-bed type, ceramic foam was inserted after Pt was coated. The volume of the combustors was 1.8 ㎤ and 16W of heat was generated using the fabricated combustors with hydrogen. The energy density of combustor was about 8.9 W/㎤.