Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject TAN

Showing results 1 to 3 of 3

1
A chemical reaction path design for the atomic layer deposition of tantalum nitride thin films

Kwon, Jung-Dae; Park, Jin-Seong; Lee, Han-Choon; Kang, Sang-Wonresearcher, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.9, no.9, pp.G282 - G284, 2006-06

2
(A) study on the plasma-enhanced atomic layer deposition of TaN thin films = Peald 법으로 증착된 TaN 박막 특성에 관한 연구link

Chung, Hoi-Sung; 정회성; et al, 한국과학기술원, 2004

3
Comparison of Tantalum Nitride Films for Different NH3/H-2/Ar Reactant States in Two-Step Atomic Layer Deposition

Kwon, Jung-Dae; Yun, Jungheum; Kang, Sang-Wonresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS, v.48, no.2, 2009

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