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1
ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구 = Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputteringlink

김성태; Kim, Sung-Tae; et al, 한국과학기술원, 1997

2
Effect of activation of oxygen by electron cyclotron resonance plasma on the incorporation of Pb in the deposition of Pb(Zr,Ti)O-3 films by DC magnetron reactive sputtering

Kim, ST; Kim, HH; Kim, YI; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.36, no.9A, pp.5663 - 5669, 1997-09

3
Effects of the deposition conditions of the seed layer on the crystallinity and electrical characteristics of the Pb(Zr,Ti)O-3 films

Kim, ST; Kim, YL; Kim, HH; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.37, no.5B, pp.594 - 596, 1998-05

4
Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O-3 films

Kim, ST; Kim, HH; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.1A, pp.294 - 300, 1997-01

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