ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputtering
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113001/325007 / 000935050
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 136 p. ]
- Keywords
Pt 기판; 활성화; ECR 프라즈마; PZT 박막; Lead zirconate titanate; Platinum substrate; Activation; ECR plasma; Sputtering
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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