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Low temperature nucleation of the perovskite phase in the deposition of Pb(Zr,Ti)O-3 films on the Pt/SiO2/Si substrate by electron cyclotron resonance plasma enhanced chemical vapor deposition Kim, Jae Whan; Kim, Hyun Ho; Wee, Dang-Moon; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.36, no.7B, pp.936 - 938, 1997-07 |
Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy Chung, Koo-Hyun; Lee, Yong-Ha; Kim, Young-Tae; Kim, Dae-Eun; Yoo, Jingyoo; Hong, Seungbum, SURFACE & COATINGS TECHNOLOGY, v.201, no.18, pp.7983 - 7991, 2007-06 |
상부 전극 증착 조건이 $Pb(Zr,Ti)O_3$ 박막의 전기적 특성에 미치는 영향 = The effects of deposition conditions of top elctrodes on the electrical properties of $Pb(Zr,Ti)O_3$ thin filmslink 이강운; Lee, Kang-Woon; et al, 한국과학기술원, 1999 |
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