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Ta-base 비정질 박막의 Cu 확산 방지 특성에 관한 연구 = A study on the barrier property of Ta-base amorphous thin film against Cu diffusionlink 이윤직; Lee, Yoon-Jik; et al, 한국과학기술원, 1998 |
Transformer coupled plasma enhanced metal organic chemical vapor deposition of Ta(Si)N thin films and their Cu diffusion barrier properties Park, HL; Byun, KM; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, no.10, pp.6153 - 6164, 2002-10 |
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