Rapid pattern inspection of shadow masks by machine vision integrated with Fourier optics

Cited 1 time in webofscience Cited 0 time in scopus
  • Hit : 647
  • Download : 1240
We present a machine vision inspection method that is specially devised to detect defects on shadow masks. This method incorporates Fourier optics to capture only irregular defects in real time by blocking out the periodically repetitive pattern of normal mask holes using a pinhole type spatial filter under coherent illumination. In addition, a fast defect-detection image processing algorithm efficiently suppresses undesirable background noisy images. Experimental results prove that this method provides a detection capability of 500 mu m(2) for the least defect size. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
Publisher
SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Issue Date
1997-12
Language
ENG
Article Type
Article
Description

Copyright 1997 Society of Photo-Optical Instrumentation Engineers.

Keywords

HOLOGRAPHY

Citation

OPTICAL ENGINEERING, v.36, no.12, pp.3309 - 3311

ISSN
0091-3286
URI
http://hdl.handle.net/10203/1654
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
Rapid Pattern Inspection of Shadow Masks by Machine Vision Integrated with Fourier Optics.pdf(372.99 kB)Download
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 1 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0