Rapid pattern inspection of shadow masks by machine vision integrated with Fourier optics

We present a machine vision inspection method that is specially devised to detect defects on shadow masks. This method incorporates Fourier optics to capture only irregular defects in real time by blocking out the periodically repetitive pattern of normal mask holes using a pinhole type spatial filter under coherent illumination. In addition, a fast defect-detection image processing algorithm efficiently suppresses undesirable background noisy images. Experimental results prove that this method provides a detection capability of 500 mu m(2) for the least defect size. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
Publisher
SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Issue Date
1997-12
Language
ENG
Description

Copyright 1997 Society of Photo-Optical Instrumentation Engineers.

Keywords

HOLOGRAPHY

Citation

OPTICAL ENGINEERING, v.36, no.12, pp.3309 - 3311

ISSN
0091-3286
URI
http://hdl.handle.net/10203/1654
Appears in Collection
ME-Journal Papers(저널논문)
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