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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

3D Topographical Measurements of Thin Films by Spectrally-Resolved White-Light Interferometry

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorGhim, Y.S.-
dc.date.accessioned2013-03-27T06:24:26Z-
dc.date.available2013-03-27T06:24:26Z-
dc.date.created2012-02-06-
dc.date.issued2007-
dc.identifier.citationASPEN 2007, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/159945-
dc.languageENG-
dc.title3D Topographical Measurements of Thin Films by Spectrally-Resolved White-Light Interferometry-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameASPEN 2007-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorGhim, Y.S.-
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ME-Conference Papers(학술회의논문)
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