초정밀 decoupled 이중 스테이지의 설계 및 제어

Abstract

This paper presents 3-axis high-precision dual-stage compatible with 300mm wafer. The proposed dualstage system consists of a fine stage for XYθ motion and a coarse stage for large travel. The fine stage uses four voice coil motors and air bearings which make mechanically decoupled plane motion on granite base. The coarse stage carry coil blocks which make Lorentz force against the fine stage with the range of 500mm ×500mm using three linear motors. To get precise position of the fine stage, laser interferometers and plane mirrors are adopted. The proposed dual-stage has good performance in both step and scan motion control. Experimental results show the positioning error is about 10nm and the tracking error in the scan motion is about 40nm.