Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology

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A variable bandwidth, flat-passband optical filter based on a variable-aperture MEMS reflector was demonstrated. The filter is compatible with silicon-optical-bench technology. The reflecting mirror surface was defined by KOH wet-etching that produced a surface roughness of < 20 nm over the mirror. The optical bandwidth of the optical filter is continuously tunable from 3.4 nm to 6.3 nm.
Publisher
Institute of Electrical and Electronics Engineers
Issue Date
2004-12
Language
ENG
Citation

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, v.2, no.0, pp.531 - 532

ISSN
1092-8081
URI
http://hdl.handle.net/10203/151288
Appears in Collection
EE-Conference Papers(학술회의논문)
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