Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology

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dc.contributor.authorYu, Kyoungsik-
dc.contributor.authorLee, D.-
dc.contributor.authorSolgaard, O.-
dc.date.accessioned2013-03-18T18:40:26Z-
dc.date.available2013-03-18T18:40:26Z-
dc.date.created2012-02-06-
dc.date.issued2004-12-
dc.identifier.citationConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, v.2, no.0, pp.531 - 532-
dc.identifier.issn1092-8081-
dc.identifier.urihttp://hdl.handle.net/10203/151288-
dc.description.abstractA variable bandwidth, flat-passband optical filter based on a variable-aperture MEMS reflector was demonstrated. The filter is compatible with silicon-optical-bench technology. The reflecting mirror surface was defined by KOH wet-etching that produced a surface roughness of < 20 nm over the mirror. The optical bandwidth of the optical filter is continuously tunable from 3.4 nm to 6.3 nm.-
dc.languageENG-
dc.publisherInstitute of Electrical and Electronics Engineers-
dc.titleVariable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume2-
dc.citation.issue0-
dc.citation.beginningpage531-
dc.citation.endingpage532-
dc.citation.publicationnameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYu, Kyoungsik-
dc.contributor.nonIdAuthorLee, D.-
dc.contributor.nonIdAuthorSolgaard, O.-
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EE-Conference Papers(학술회의논문)
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