Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yu, Kyoungsik | - |
| dc.contributor.author | Lee, D. | - |
| dc.contributor.author | Solgaard, O. | - |
| dc.date.accessioned | 2013-03-18T18:40:26Z | - |
| dc.date.available | 2013-03-18T18:40:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-12 | - |
| dc.identifier.citation | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, v.2, no.0, pp.531 - 532 | - |
| dc.identifier.issn | 1092-8081 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/151288 | - |
| dc.description.abstract | A variable bandwidth, flat-passband optical filter based on a variable-aperture MEMS reflector was demonstrated. The filter is compatible with silicon-optical-bench technology. The reflecting mirror surface was defined by KOH wet-etching that produced a surface roughness of < 20 nm over the mirror. The optical bandwidth of the optical filter is continuously tunable from 3.4 nm to 6.3 nm. | - |
| dc.language | ENG | - |
| dc.publisher | Institute of Electrical and Electronics Engineers | - |
| dc.title | Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 2 | - |
| dc.citation.issue | 0 | - |
| dc.citation.beginningpage | 531 | - |
| dc.citation.endingpage | 532 | - |
| dc.citation.publicationname | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Yu, Kyoungsik | - |
| dc.contributor.nonIdAuthor | Lee, D. | - |
| dc.contributor.nonIdAuthor | Solgaard, O. | - |
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