DSpace at KOASAS: Fabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Fabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology

Cited 0 time in webofscience

Cited 0 time in scopus

Hit : 347
Download : 0

Export

LEE, ES / JEONG, JH / KIM, KD / PARK, SH / LIM,TW / Yang, Dong-Yol researcher / CHA, NG

Publisher: 4th Int. Conf. on Nanoimprint and Nanoprint technology

Issue Date: 2005

Language: ENG

Citation: 4th Int. Conf. on Nanoimprint and Nanoprint technology, v.6, no.11, pp.3619 - 3623

URI: http://hdl.handle.net/10203/148696

Appears in Collection: ME-Conference Papers(학술회의논문)

Files in This Item: There are no files associated with this item.

Display Full Item Record

qr_code

트윗하기

KOASAS

Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
Copyright © 2016. Korea Advanced Institute of Science and Technology. All Rights Reserved.

KOASAS

KOASAS

Browse

Fabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology

KOASAS

Communities & Collections