Linear stage의 진동 특성 연구A Study on Vibration Characteristics of the Linear stage for CCD

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Publisher
한국정밀공학회
Issue Date
2006-10-18
Language
KOR
Citation

한국정밀공학회 2006년도 추계학술대회, v.6, pp.645 - 646

URI
http://hdl.handle.net/10203/140427
Appears in Collection
ME-Conference Papers(학술회의논문)
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