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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

UV-nanoimprint lithography using a diamond-like carbon stamp

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Jeong J.-H. / Kim K.-D. / Sim Y.-S. / Choi D.-G. / Lee E.-S. / Park S.-H. / Lim T.-W. / Yang, Dong-Yolresearcher
Issue Date
2006-01-21
Language
ENG
Citation

SPIE(the international society for optical engineering), 31th international symposium, v.6151 II, pp.19 - 24

ISSN
0277-786X
URI
http://hdl.handle.net/10203/140241
Appears in Collection
ME-Conference Papers(학술회의논문)
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