CHARACTERIZATION OF PBTIO3 THIN-FILMS DEPOSITED ON PT/TI/SIO2/SI SUBSTRATES BY ECR PECVD

The electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR PECVD) method is used to prepare ferroelectric PbTiO3 films. Single-phase perovskite PbTiO3 films with smooth surfaces and fine grain size were successfully fabricated on Pt/Ti/SiO2/Si substrates at low temperatures of 400-500 degrees C using metal-organic (MO) sources. The chemical compositions, structural phases, surface morphologies, and depth profiles of the PbTiO3 thin films were investigated using EDS, XRD, SEM, RBS, and AES. Variations of those properties with process temperature and gas supply ratio are discussed. When the process temperature was above 450 degrees C, the stoichiometric perovskite PbTiO3 films could be obtained even though the MO source supply ratio was varied in a wide range if the oxygen supply was sufficient.
Publisher
MATERIALS RESEARCH SOCIETY
Issue Date
1995-02
Language
ENG
Keywords

CHEMICAL-VAPOR-DEPOSITION; CRYSTAL-STRUCTURE

Citation

JOURNAL OF MATERIALS RESEARCH, v.10, no.2, pp.447 - 452

ISSN
0884-2914
URI
http://hdl.handle.net/10203/1309
Appears in Collection
MS-Journal Papers(저널논문)
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