White light phase-shifting interferometry with self-compensation of PZT scanning errors

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Publisher
ICOSN
Issue Date
1999-06
Language
English
Citation

International Conference on Optical Engineering for Sensing and Nanotechnology(ICOSN'99), pp.16 - 19

URI
http://hdl.handle.net/10203/130169
Appears in Collection
ME-Conference Papers(학술회의논문)
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