Arrays of binary and ternary particles and their replica pores on patterned microchannels

Arrays of Binary and Ternary Particles and Their Replica Pores on Patterned Microchannels A novel method was developed for the assembly of patterned binary and ternary particle arrays and their inverted pore structures onto V-shaped microchannels that were fabricated by soft lithography. For the ternary particle arrays and their inverted pore structures, a dip-coating of binary particle mixture with a controlled size ratio and subsequent O(2) RIE were used.
Publisher
AMER CHEMICAL SOC
Issue Date
2003-11
Language
ENG
Keywords

PHOTONIC CRYSTALS; COLLOIDAL CRYSTALS; NANOSPHERE LITHOGRAPHY; SPONTANEOUS EMISSION; POROUS SILICA; FABRICATION; CRYSTALLIZATION; MICROSPHERES; TEMPLATES; SURFACES

Citation

CHEMISTRY OF MATERIALS, v.15, no.22, pp.4169 -

ISSN
0897-4756
URI
http://hdl.handle.net/10203/12708
Appears in Collection
CBE-Journal Papers(저널논문)
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