DSpace at KOASAS: On the Inductively Coupled Plasma for the Next

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

On the Inductively Coupled Plasma for the Next - Generation Processing.

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Chang, Hong-Young researcher

Publisher: Particle Beams & Plasma Interaction on Materials

Issue Date: 2002

Language: ENG

Citation: International Workshop of Particle Beams & Plasma Interaction on Materials

URI: http://hdl.handle.net/10203/125874

Appears in Collection: PH-Conference Papers(학술회의논문)

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