E-beam Lithography 공정의 컴퓨터 모사를 위한 PMMA Resist의 Molecular Dynamics 계산을 통한 Monte-Calro 계산의 응용

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Publisher
한국요업학회
Issue Date
1997-01-01
Language
KOR
Citation

한국요업학회 추계학술발표대회

URI
http://hdl.handle.net/10203/123265
Appears in Collection
MS-Conference Papers(학술회의논문)
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